Data tables are available via the links below. 

Components of population change by single year of age, five-year age group and sex for the period from July 1 to June 30, annual, based on the Standard Geographical Classification (SGC) 2016. The components include births, deaths, immigrants, emigrants, returning emigrants, net temporary emigration, net interprovincial migration, net intraprovincial migration, net non-permanent residents and residual deviation.

Components of population change by census division, 2016 boundaries:
https://www150.statcan.gc.ca/t1/tbl1/en/tv.action?pid=1710014001

Components of population change by by census metropolitan area and census agglomeration, 2016 boundaries: 
https://www150.statcan.gc.ca/t1/tbl1/en/tv.action?pid=1710013601

Components of population change by economic region, 2016 boundaries: 
https://www150.statcan.gc.ca/t1/tbl1/en/tv.action?pid=1710013801

Statistics Canada also offers interactive dashboards to visualize these data:
Annual demographic estimates, census divisions: Interactive dashboard:
https://www150.statcan.gc.ca/n1/pub/71-607-x/71-607-x2020021-eng.htm

Annual demographic estimates, census metropolitan areas and census agglomerations: Interactive dashboard:
https://www150.statcan.gc.ca/n1/pub/71-607-x/71-607-x2020003-eng.htm

Annual demographic estimates, economic regions: Interactive dashboard
https://www150.statcan.gc.ca/n1/pub/71-607-x/71-607-x2020020-eng.htm